TY  - RPRT
TI  - A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks
AU  - Tobias Schlosser
AU  - Frederik Beuth
AU  - Michael Friedrich
AU  - Danny Kowerko
PY  - 2024
DO  - 10.1109/etfa.2019.8869311
UR  - https://arxiv.org/abs/1911.11250
ID  - 1911.11250
ER  -