TY  - RPRT
TI  - Integrating Graphene into Semiconductor Fabrication Lines
AU  - Daniel Neumaier
AU  - Stephan Pindl
AU  - Max C. Lemme
PY  - 2019
DO  - 10.1038/s41563-019-0359-7
UR  - https://arxiv.org/abs/1912.04090
ID  - 1912.04090
ER  -