@misc{indiciae4e27a3cb3d32,
  title = {P-type \$δ\$-doping with Diborane on Si(001) for STM Based Dopant Device Fabrication},
  author = {Tomáš Škereň and Sigrun Köster and Bastien Douhard and Claudia Fleischmann and Andreas Fuhrer},
  year = {2019},
  doi = {10.1038/s41928-020-0445-5},
  url = {https://arxiv.org/abs/1912.06188},
  note = {Source identifier: 1912.06188}
}