TY  - RPRT
TI  - P-type $δ$-doping with Diborane on Si(001) for STM Based Dopant Device Fabrication
AU  - Tomáš Škereň
AU  - Sigrun Köster
AU  - Bastien Douhard
AU  - Claudia Fleischmann
AU  - Andreas Fuhrer
PY  - 2019
DO  - 10.1038/s41928-020-0445-5
UR  - https://arxiv.org/abs/1912.06188
ID  - 1912.06188
ER  -