@misc{indiciae2e2c702eabb1,
  title = {Validating the Critical Point of Spontaneous Parametric Down-Conversion for over 600 Scanning MEMS Micro Mirrors on Wafer-Level},
  author = {Ulrike Nabholz and Florian Stockmar and Jan E. Mehner and Peter Degenfeld-Schonburg},
  year = {2020},
  doi = {10.1109/lsens.2020.2964384},
  url = {https://arxiv.org/abs/1912.06189},
  note = {Source identifier: 1912.06189}
}