TY - RPRT TI - Validating the Critical Point of Spontaneous Parametric Down-Conversion for over 600 Scanning MEMS Micro Mirrors on Wafer-Level AU - Ulrike Nabholz AU - Florian Stockmar AU - Jan E. Mehner AU - Peter Degenfeld-Schonburg PY - 2020 DO - 10.1109/lsens.2020.2964384 UR - https://arxiv.org/abs/1912.06189 ID - 1912.06189 ER -