@misc{indiciaed50a6cc8a38a,
  title = {The refined EUV mask model},
  author = {I. A. Makhotkin and M. Wu and V. Soltwisch and F. Scholze and V. Philipsen},
  year = {2019},
  url = {https://arxiv.org/abs/1912.09075},
  note = {Source identifier: 1912.09075}
}