@misc{indiciaefd1f45e716da,
  title = {Solid-state qubits integrated with superconducting through-silicon vias},
  author = {Donna-Ruth W. Yost and Mollie E. Schwartz and Justin Mallek and Danna Rosenberg and Corey Stull and Jonilyn L. Yoder and Greg Calusine and Matt Cook and Rabindra Das and Alexandra L. Day and Evan B. Golden and David K. Kim and Alexander Melville and Bethany M. Niedzielski and Wayne Woods and Andrew J. Kerman and Willam D. Oliver},
  year = {2020},
  doi = {10.1038/s41534-020-00289-8},
  url = {https://arxiv.org/abs/1912.10942},
  note = {Source identifier: 1912.10942}
}