TY - RPRT TI - UV-laser modification and selective ion-beam etching of amorphous vanadium pentoxide thin films AU - Alexander Cheremisin AU - Vadim Putrolaynen AU - Andrei Velichko AU - Alexander Pergament AU - Nikolay Kuldin AU - Alexander Grishin PY - 2020 DO - 10.1002/pssa.200824175 UR - https://arxiv.org/abs/2001.03054 ID - 2001.03054 ER -