@misc{indiciae5a8cd8cc0b69,
  title = {Plasma Stratification in Radio-Frequency Discharges of Noble Gases},
  author = {Vladimir I Kolobov and Robert R Arslanbekov and Dmitry Levko and Valery A Godyak},
  year = {2020},
  doi = {10.1088/1361-6463/ab7ca0},
  url = {https://arxiv.org/abs/2001.04874},
  note = {Source identifier: 2001.04874}
}