TY  - RPRT
TI  - Plasma Stratification in Radio-Frequency Discharges of Noble Gases
AU  - Vladimir I Kolobov
AU  - Robert R Arslanbekov
AU  - Dmitry Levko
AU  - Valery A Godyak
PY  - 2020
DO  - 10.1088/1361-6463/ab7ca0
UR  - https://arxiv.org/abs/2001.04874
ID  - 2001.04874
ER  -