@misc{indiciae8be96e2e58ea,
  title = {Plasmonic Titanium Nitride via Atomic Layer Deposition: A Low-Temperature Route},
  author = {Dhruv Fomra and Ray Secondo and Kai Ding and Vitaliy Avrutin and Natalia Izyumskaya and Ümit Özgür and Nathaniel Kinsey},
  year = {2019},
  doi = {10.1063/1.5130889},
  url = {https://arxiv.org/abs/2001.05063},
  note = {Source identifier: 2001.05063}
}