@misc{indiciaeefb9ca61b6ce,
  title = {Model-based interfacing of large-scale metrology instruments},
  author = {Benjamin Montavon and Martin Peterek and Robert H. Schmitt},
  year = {2020},
  doi = {10.1117/12.2527461},
  url = {https://arxiv.org/abs/2001.05897},
  note = {Source identifier: 2001.05897}
}