TY  - RPRT
TI  - Model-based interfacing of large-scale metrology instruments
AU  - Benjamin Montavon
AU  - Martin Peterek
AU  - Robert H. Schmitt
PY  - 2020
DO  - 10.1117/12.2527461
UR  - https://arxiv.org/abs/2001.05897
ID  - 2001.05897
ER  -