@misc{indiciae35adea343e0b,
  title = {Static Pull-in Behavior of Hybrid Levitation Micro-Actuators: Simulation, Modelling and Experimental Study},
  author = {Kirill Poletkin},
  year = {2020},
  doi = {10.1109/tmech.2020.2999516},
  url = {https://arxiv.org/abs/2001.09428},
  note = {Source identifier: 2001.09428}
}