TY - RPRT TI - Static Pull-in Behavior of Hybrid Levitation Micro-Actuators: Simulation, Modelling and Experimental Study AU - Kirill Poletkin PY - 2020 DO - 10.1109/tmech.2020.2999516 UR - https://arxiv.org/abs/2001.09428 ID - 2001.09428 ER -