@misc{indiciaed7f702fc0ab1,
  title = {A versatile and compact high-intensity electron beam for multi-kGy irradiation in nano or micro-electronic devices},
  author = {F. Gobet and J. Gardelle and M. Versteegen and L. Courtois and S. Leblanc and V. Méot},
  year = {2020},
  doi = {10.1063/1.5141476},
  url = {https://arxiv.org/abs/2001.10034},
  note = {Source identifier: 2001.10034}
}