@misc{indiciaed7acfac4e651, title = {Robust multi-scale multi-feature deep learning for atomic and defect identification in Scanning Tunneling Microscopy on H-Si(100) 2x1 surface}, author = {Maxim Ziatdinov and Udi Fuchs and James H. G. Owen and John N. Randall and Sergei V. Kalinin}, year = {2020}, url = {https://arxiv.org/abs/2002.04716}, note = {Source identifier: 2002.04716} }