@misc{indiciae56ba6f129baf,
  title = {Low Thermal Budget High-k/Metal Surface Gate for Buried Donor-Based Devices},
  author = {Evan M. Anderson and DeAnna M. Campbell and Leon N. Maurer and Andrew D. Baczewski and Michael T. Marshall and Tzu-Ming Lu and Ping Lu and Lisa A. Tracy and Scott W. Schmucker and Daniel R. Ward and Shashank Misra},
  year = {2020},
  doi = {10.1088/2515-7639/ab953b},
  url = {https://arxiv.org/abs/2002.09075},
  note = {Source identifier: 2002.09075}
}