@misc{indiciaee5f4232d965e, title = {A Deep Learning Framework for Simulation and Defect Prediction Applied in Microelectronics}, author = {Nikolaos Dimitriou and Lampros Leontaris and Thanasis Vafeiadis and Dimosthenis Ioannidis and Tracy Wotherspoon and Gregory Tinker and Dimitrios Tzovaras}, year = {2020}, doi = {10.1016/j.simpat.2019.102063}, url = {https://arxiv.org/abs/2002.10986}, note = {Source identifier: 2002.10986} }