@misc{indiciae90596acdabb3, title = {Atomic Precision Advanced Manufacturing for Digital Electronics}, author = {Daniel R. Ward and Scott W. Schmucker and Evan M. Anderson and Ezra Bussmann and Lisa Tracy and Tzu-Ming Lu and Leon N. Maurer and Andrew Baczewski and Deanna M. Campbell and Michael T. Marshall and Shashank Misra}, year = {2020}, doi = {10.31399/asm.edfa.2020-1.p004}, url = {https://arxiv.org/abs/2002.11003}, note = {Source identifier: 2002.11003} }