@misc{indiciae3ca6cbed7335,
  title = {Microscope Projection Photolithography Based on Liquid Crystal Microdisplay},
  author = {Young-Gu Ju and Hyeon-Jun Kim and Young-Min Ko},
  year = {2020},
  doi = {10.1088/1361-6404/ab988f},
  url = {https://arxiv.org/abs/2002.11639},
  note = {Source identifier: 2002.11639}
}