TY  - RPRT
TI  - Microscope Projection Photolithography Based on Liquid Crystal Microdisplay
AU  - Young-Gu Ju
AU  - Hyeon-Jun Kim
AU  - Young-Min Ko
PY  - 2020
DO  - 10.1088/1361-6404/ab988f
UR  - https://arxiv.org/abs/2002.11639
ID  - 2002.11639
ER  -