@misc{indiciaee1264066512c,
  title = {The Simulation, Fabrication Technology and Characteristic Research of Micro-Pressure Sensor with Isosceles Trapezoidal Beam-Membrane},
  author = {Jing Wu and Xiaofeng Zhao and Yibo Liu and Dianzhong Wen},
  year = {2020},
  doi = {10.1142/s0217984920503285},
  url = {https://arxiv.org/abs/2002.12484},
  note = {Source identifier: 2002.12484}
}