TY  - RPRT
TI  - The Simulation, Fabrication Technology and Characteristic Research of Micro-Pressure Sensor with Isosceles Trapezoidal Beam-Membrane
AU  - Jing Wu
AU  - Xiaofeng Zhao
AU  - Yibo Liu
AU  - Dianzhong Wen
PY  - 2020
DO  - 10.1142/s0217984920503285
UR  - https://arxiv.org/abs/2002.12484
ID  - 2002.12484
ER  -