@misc{indiciaea23ba0fd9025, title = {Split-Gate Cavity Coupler for Silicon Circuit Quantum Electrodynamics}, author = {F. Borjans and X. Croot and S. Putz and X. Mi and S. M. Quinn and A. Pan and J. Kerckhoff and E. J. Pritchett and C. A. Jackson and L. F. Edge and R. S. Ross and T. D. Ladd and M. G. Borselli and M. F. Gyure and J. R. Petta}, year = {2020}, doi = {10.1063/5.0006442}, url = {https://arxiv.org/abs/2003.01088}, note = {Source identifier: 2003.01088} }