TY  - RPRT
TI  - Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
AU  - Horia-Eugen
AU  - Porteanu
AU  - Ilija Stefanović
AU  - Michael Klute
AU  - Ralf-Peter Brinkmann
AU  - Peter Awakowicz
AU  - Wolfgang Heinrich
PY  - 2020
UR  - https://arxiv.org/abs/2003.01462
ID  - 2003.01462
ER  -