@misc{indiciae4399824a78a4,
  title = {A Study of Selectively Digital Etching Silicon-Germanium with Nitric and Hydrofluoric Acids},
  author = {Chen Li and Huilong Zhu and Yongkui Zhang and Xiaogen Yin and Kunpeng Jia and Junjie Li and Guilei Wang and Zhenzhen Kong and Anyan Du and Tengzhi Yang and Liheng Zhao and Lu Xie and Xuezheng Ai and Shishuai Ma and Yangyang Li and Henry H. Radamson},
  year = {2020},
  url = {https://arxiv.org/abs/2003.03529},
  note = {Source identifier: 2003.03529}
}