@misc{indiciae9d6f24b908ac,
  title = {Design and construction of a compact rotary substrate heater for deposition systems},
  author = {Israel Perez and Tareik Netro and Mario Vazquez and Jose Elizalde},
  year = {2020},
  doi = {10.1139/cjp-2019-0530},
  url = {https://arxiv.org/abs/2003.04184},
  note = {Source identifier: 2003.04184}
}