TY  - RPRT
TI  - Design and construction of a compact rotary substrate heater for deposition systems
AU  - Israel Perez
AU  - Tareik Netro
AU  - Mario Vazquez
AU  - Jose Elizalde
PY  - 2020
DO  - 10.1139/cjp-2019-0530
UR  - https://arxiv.org/abs/2003.04184
ID  - 2003.04184
ER  -