@misc{indiciae0905d6090b30,
  title = {Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration},
  author = {Jake A. McCoy and Randall L. McEntaffer and Drew M. Miles},
  year = {2020},
  doi = {10.3847/1538-4357/ab76d3},
  url = {https://arxiv.org/abs/2003.06449},
  note = {Source identifier: 2003.06449}
}