TY  - RPRT
TI  - Extreme Ultraviolet and Soft X-Ray Diffraction Efficiency of a Blazed Reflection Grating Fabricated by Thermally Activated Selective Topography Equilibration
AU  - Jake A. McCoy
AU  - Randall L. McEntaffer
AU  - Drew M. Miles
PY  - 2020
DO  - 10.3847/1538-4357/ab76d3
UR  - https://arxiv.org/abs/2003.06449
ID  - 2003.06449
ER  -