@misc{indiciae913fd5b73f0e,
  title = {Manufacture and Characterization of Graphene Membranes with Suspended Silicon Proof Masses for MEMS and NEMS Applications},
  author = {Xuge Fan and Anderson D. Smith and Fredrik Forsberg and Stefan Wagner and Stephan Schröder and Sayedeh Shirin Afyouni Akbari and Andreas C. Fischer and Luis Guillermo Villanueva and Mikael Östling and Max C. Lemme and Frank Niklaus},
  year = {2020},
  doi = {10.1038/s41378-019-0128-4},
  url = {https://arxiv.org/abs/2003.07247},
  note = {Source identifier: 2003.07247}
}