@misc{indiciae652001bda424,
  title = {Suspended graphene membranes with attached silicon proof masses as piezoresistive NEMS accelerometers},
  author = {Xuge Fan and Fredrik Forsberg and Anderson D. Smith and Stephan Schröder and Stefan Wagner and Mikael Östling and Max C. Lemme and Frank Niklaus},
  year = {2020},
  doi = {10.1021/acs.nanolett.9b01759},
  url = {https://arxiv.org/abs/2003.08296},
  note = {Source identifier: 2003.08296}
}