@misc{indiciaed1c022586e31,
  title = {High-fidelity Two-qubit Gates Using a MEMS-based Beam Steering System for Individual Qubit Addressing},
  author = {Ye Wang and Stephen Crain and Chao Fang and Bichen Zhang and Shilin Huang and Qiyao Liang and Pak Hong Leung and Kenneth R. Brown and Jungsang Kim},
  year = {2020},
  doi = {10.1103/physrevlett.125.150505},
  url = {https://arxiv.org/abs/2003.12430},
  note = {Source identifier: 2003.12430}
}