@misc{indiciae2de93b7efe9d,
  title = {In situ atomic force microscopy depth-corrected 3-dimensional focused ion beam based time-of-flight secondary ion mass spectroscopy: spatial resolution, surface roughness, oxidation},
  author = {Lex Pillatsch and Szilvia Kalácska and Xavier Maeder and Johann Michler},
  year = {2020},
  doi = {10.1017/s1431927620024678},
  url = {https://arxiv.org/abs/2003.13294},
  note = {Source identifier: 2003.13294}
}