TY  - RPRT
TI  - In situ atomic force microscopy depth-corrected 3-dimensional focused ion beam based time-of-flight secondary ion mass spectroscopy: spatial resolution, surface roughness, oxidation
AU  - Lex Pillatsch
AU  - Szilvia Kalácska
AU  - Xavier Maeder
AU  - Johann Michler
PY  - 2020
DO  - 10.1017/s1431927620024678
UR  - https://arxiv.org/abs/2003.13294
ID  - 2003.13294
ER  -