@misc{indiciae92ea8d78a63c,
  title = {Fabrication of Deep-Sub-Micrometer NbN/AlN/NbN Epitaxial Junctions on a Si Substrate},
  author = {Wei Qiu and Hirotaka Terai},
  year = {2020},
  doi = {10.35848/1882-0786/abbfde},
  url = {https://arxiv.org/abs/2004.00922},
  note = {Source identifier: 2004.00922}
}