TY  - RPRT
TI  - Fabrication of Deep-Sub-Micrometer NbN/AlN/NbN Epitaxial Junctions on a Si Substrate
AU  - Wei Qiu
AU  - Hirotaka Terai
PY  - 2020
DO  - 10.35848/1882-0786/abbfde
UR  - https://arxiv.org/abs/2004.00922
ID  - 2004.00922
ER  -