@misc{indiciaed49d4f2cfa20,
  title = {Epitaxial metals for interconnects beyond Cu},
  author = {Katayun Barmak and Sameer Ezzat and Ryan Gusle and Atharv Jog and Sit Kerdsongpanya and Asim Khanya and Erik Milosevic and William Richardson and Kadir Sentosun and Amirali Zangiabadi and Daniel Gall and William E. Kaden and Eduardo R. Mucciolo and Patrick K. Schelling and Alan C. West and Kevin R. Coffey},
  year = {2020},
  doi = {10.1116/6.0000018},
  url = {https://arxiv.org/abs/2004.00971},
  note = {Source identifier: 2004.00971}
}