@misc{indiciae931173597cae,
  title = {Atomic Layer Deposition of SiO\$\_2\$-GeO\$\_2\$ multilayers},
  author = {Jordi Antoja-Lleonart and Silang Zhou and Kit de Hond and Gertjan Koster and Guus Rijnders and Beatriz Noheda},
  year = {2020},
  doi = {10.1063/5.0009844},
  url = {https://arxiv.org/abs/2004.02622},
  note = {Source identifier: 2004.02622}
}