@misc{indiciae117af9cdf464,
  title = {Crystallographic Orientation Dependent Reactive Ion Etch in Single Crystal Diamond},
  author = {Ling Xie and Tony X. Zhou and Rainer J. Stöhr and Amir Yacoby},
  year = {2020},
  doi = {10.1002/adma.201705501},
  url = {https://arxiv.org/abs/2004.03423},
  note = {Source identifier: 2004.03423}
}