@misc{indiciaef6ceb6766d9c, title = {High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2}, author = {Amy Butcher and Xinghan Guo and Robert Shreiner and Nazar Delegan and Kai Hao and Peter J. Duda III and David D. Awschalom and F. Joseph Heremans and Alexander A. High}, year = {2020}, doi = {10.1021/acs.nanolett.0c01467}, url = {https://arxiv.org/abs/2004.03532}, note = {Source identifier: 2004.03532} }