@misc{indiciaecdbdbaa69038, title = {Fabrication process and failure analysis for robust quantum dots in silicon}, author = {J. P. Dodson and Nathan Holman and Brandur Thorgrimsson and Samuel F. Neyens and E. R. MacQuarrie and Thomas McJunkin and Ryan H. Foote and L. F. Edge and S. N. Coppersmith and M. A. Eriksson}, year = {2020}, doi = {10.1088/1361-6528/abb559}, url = {https://arxiv.org/abs/2004.05683}, note = {Source identifier: 2004.05683} }