@misc{indiciae49faf85f5a7d, title = {Metastable atomic layer deposition: 3D self-assembly towards ultra dark materials}, author = {Mario Ziegler and Andre Dathe and Kilian Pollok and Falko Langenhorst and Uwe Huebner and Dong Wang and Peter Schaaf}, year = {2020}, url = {https://arxiv.org/abs/2004.09869}, note = {Source identifier: 2004.09869} }