@misc{indiciae7449c0fd69e4,
  title = {Nanolaminated Al2O3/HfO2 dielectrics for silicon carbide based devices},
  author = {Raffaella Lo Nigro and Emanuela Schilirò and Patrick Fiorenza and Fabrizio Roccaforte},
  year = {2021},
  doi = {10.1116/1.5134662},
  url = {https://arxiv.org/abs/2004.10988},
  note = {Source identifier: 2004.10988}
}