@misc{indiciae9a445b7b66f1,
  title = {Towards High Throughput Large Area Metalens Fabrication using UV-Nanoimprint lithography and Bosch Deep Reactive Ion Etching},
  author = {Christopher A. Dirdal and Geir Uri Jensen and Hallvard Angelskår and Paul Conrad Vaagen Thrane and Jo Gjessing and Daniel Alfred Ordnung},
  year = {2020},
  doi = {10.1364/oe.393328},
  url = {https://arxiv.org/abs/2004.11133},
  note = {Source identifier: 2004.11133}
}