TY  - RPRT
TI  - Towards High Throughput Large Area Metalens Fabrication using UV-Nanoimprint lithography and Bosch Deep Reactive Ion Etching
AU  - Christopher A. Dirdal
AU  - Geir Uri Jensen
AU  - Hallvard Angelskår
AU  - Paul Conrad Vaagen Thrane
AU  - Jo Gjessing
AU  - Daniel Alfred Ordnung
PY  - 2020
DO  - 10.1364/oe.393328
UR  - https://arxiv.org/abs/2004.11133
ID  - 2004.11133
ER  -