@misc{indiciaebc7b1171b1bc,
  title = {Suspended photonic crystal membranes in AlGaAs heterostructures for integrated multi-element optomechanics},
  author = {Sushanth Kini Manjeshwar and Karim Elkhouly and Jamie M. Fitzgerald and Martin Ekman and Yanchao Zhang and Fan Zhang and Shu Min Wang and Philippe Tassin and Witlef Wieczorek},
  year = {2020},
  doi = {10.1063/5.0012667},
  url = {https://arxiv.org/abs/2004.12454},
  note = {Source identifier: 2004.12454}
}