@misc{indiciaefd8c5ea5d5a6,
  title = {Boron Liquid Metal Alloy Ion Sources For Special FIB Applications},
  author = {Lothar Bischoff and Nico Klingner and Paul Mazarov and Wolfgang Pilz and Florian Meyer},
  year = {2020},
  doi = {10.1116/6.0000073},
  url = {https://arxiv.org/abs/2004.12722},
  note = {Source identifier: 2004.12722}
}